1700C High vacuum CVD tube furnace with MFC system is customized with conductive electrode water-cooled flange, matched 2-channel MFC precise gas flow control system and complete dual-stage rotary vane vacuum pump unit. It supports vacuum, inert, reducing atmosphere and electrified heating processes, widely used in lab material research, ceramic sintering, CVD deposition, lithium battery material calcination.
1700C High vacuum CVD tube furnace with MFC system
| SK2-XY-17TPD2 | |
| Max.design(℃) | 1700 |
| 0-1600 | |
| 100mm | |
| 200mm | |
| 220V 1phase | |
| K | |
| Max.vacuum | 10Pa |
| 0-5C/min | |
| Temp.Precision | ±1℃ |
| 1700℃ grade Alumina ceramic firber refractory chamber | |
| 2-way MFC air intake system, maximum positive pressure not exceeding 0.02Mpa | |
| The product in the picture has an air inlet and an exhaust hole with a ball valve. Both ends can be connected to a vacuum pump or a flow meter can be added. | |
| Two-stage rotary vane pump Ultimate pressure: 5*10^-2 Pa Maximum vacuum of the furnace: 10 Pa |
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| The equipment casing is made of carbon steel and 304 stainless steel flange, which is openable and easy to install and remove. The casing is resistant to oxidation, acid and alkali, and has double sealing. | |
| Adopt international advanced yudian 518P temperature controller, with 30 programmable PID self-tuning, automatic temperature rise, automatic temperature drop, no duty. | |
| Touch screen model. Adopting advanced temperature instruments, 50 segment programs can be set, with high temperature control accuracy,SSR control, PID parameter self-tuning function; program temperature rise, program heat preservation, program cooling |
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| CE, ISO, SGS ect, more than 30 patent certifications | ||||
| One-year warranty (excluding wearing parts) and long-term technical support |
Official certification, professional after sales service.
ISO9001
The gas pressure in the furnace tube cannot be higher than 0.02MPa
·Due to the high gas pressure inside the gas cylinder, a pressure reducing valve must be installed on the gas cylinder when the gas is introduced into the furnace tube. To ensure safety, it is recommended to use a pressure lower than 0.02MPa. It is recommended to purchase a pressure reducing valve from our company. The range of our company's pressure reducing valve is 0.01MPa-0.1MPa, which will be more accurate and safe when used. When the furnace body temperature is higher than 1000℃, the furnace tube cannot be in a vacuum state, and the gas pressure in the furnace tube must be equivalent to atmospheric pressure.
·The gas flow rate entering the furnace tube must be less than 200SCCM to avoid the impact of cold air flow on the heated quartz tube.
·The long-term use temperature of the quartz tube is <1100℃.
·For the experiment of sample heating, it is not recommended to close the exhaust valve and the air inlet valve at the flange end of the furnace tube. If you need to close the gas valve to heat the sample, you need to pay attention to the pressure gauge at all times. If the pressure reading is greater than 0.02MPa, you must immediately open the air relief valve to prevent accidents (such as furnace tube rupture, flange flying out, etc.)
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